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10 April 2000 Design, fabrication, and packaging of closed-chamber PCR chips for DNA amplification
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382271
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
This paper reports the design, fabrication and packaging of a micro machined silicon/Pyrex based chip for the polymerase chain reaction. Anodic bonding is used for sealing the chambers of 1 (mu) l volume with a Pyrex glass wafer. Platinum resistors on the back of the wafer are used as heaters and temperature sensors. The chip is externally cooled by forced air to achieve rapid temperature cycling. The transparency of the Pyrex makes it possible for using optical readout methods. The packaging is especially designed for easy handling, filling, power connection, temperature regulation and optical readout. The mass production of such silicon reactors could make single-shot, disposable devices economically viable.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian G. J. Schabmueller, Alan G. R. Evans, Arthur Brunnschweiler, Graham J. Ensell, Dario L. Leslie, and M. A. Lee "Design, fabrication, and packaging of closed-chamber PCR chips for DNA amplification", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382271
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