Nonlinear analysis of beams under electrostatic loads

A. Gugliotta; Aurelio Soma; S. Di Mauro; F. De Bona; F. Roccaforte

doi:10.1117/12.382265

10 April 2000 Nonlinear analysis of beams under electrostatic loads

A. Gugliotta, Aurelio Soma, S. Di Mauro, F. De Bona, F. Roccaforte

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382265
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

The aim of this work is that of evaluating the relative contribution of the different non-linearities in the simple case of slender cantilever beams and plates under electrostatic loads. This case not allows analytical solution to be achieved and therefore a numerical approach must be followed. Multipurpose commercial software do not feature simultaneous solution of electrostatic and structural problems. In this work a solution algorithm for the coupled electro-mechanical system to be implemented in a finite element commercial software is prosed. The solution follows a Newton iterative method in which the solution of the linear system is obtained through the biconjugate gradient stabilized method. This approach is compared with the already proposed relaxation scheme. The 2D case was firstly considered taking into account the contribution of the fringing field on the tip of the beam. In order of evaluate the accuracy of such a model a 3D model has also been developed taking into account the fringing field on the lateral surface, the anticlastic curvature of the beam and the lateral effect of the constraint. The result obtained emphasizes the coupling between electrical and mechanical solution as an error around 30 percent is obtained if the mechanical solution is calculated on the base of the undeformed electric field On the other hand the 2D mode gives a suitable model of the structure as an error of the order of 2.5 percent with respect to the 3D case has been obtained.

Citation Download Citation

A. Gugliotta, Aurelio Soma, S. Di Mauro, F. De Bona, and F. Roccaforte "Nonlinear analysis of beams under electrostatic loads", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382265

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available