Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Jussi Graeffe; Mika Suhonen; Hannu Sipola; Teuvo Sillanpaa

doi:10.1117/12.382277

10 April 2000 Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Jussi Graeffe, Mika Suhonen, Hannu Sipola, Teuvo Sillanpaa

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382277
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Micro technology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micro machined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/- 3 mrad.

Citation Download Citation

Jussi Graeffe, Mika Suhonen, Hannu Sipola, and Teuvo Sillanpaa "Scanning micromechanical mirror for fine-pointing units of intersatellite optical links", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382277

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