Paper
10 April 2000 Technical comparison of micro-electrodischarge machining, microdrilling, and copper vapor laser machining for the fabrication of ink jet nozzles
David M. Allen, Heather J. A. Almond, Peter Logan
Author Affiliations +
Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382322
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
Ink jet nozzles require accurate definition and smooth surface finish to promote laminar flow of ink and prevent turbulence. We have fabricated ink jet nozzles by three different fabrication ttechniques to evaluate the characteristics of each technique and assess the differences between them. Scanning electron micrographs illustrate the differences between the three types of nozzle produced and these have been quantified where possible. The machining times for these fabrication processes are also compared.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David M. Allen, Heather J. A. Almond, and Peter Logan "Technical comparison of micro-electrodischarge machining, microdrilling, and copper vapor laser machining for the fabrication of ink jet nozzles", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382322
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Cited by 23 scholarly publications.
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KEYWORDS
Electrodes

Copper vapor lasers

Micromachining

Scanning electron microscopy

Photomicroscopy

Fabrication

Metals

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