Scaled CMOS MEMS for real-time infrared scene generation

Bruce W. Offord; H. Ronald Marlin; Richard L. Bates; Gordon C. Perkins; Chris Hutchens; Derek Yunchih Huang

doi:10.1117/12.391678

12 July 2000 Scaled CMOS MEMS for real-time infrared scene generation

Bruce W. Offord, H. Ronald Marlin, Richard L. Bates, Gordon C. Perkins, Chris Hutchens, Derek Yunchih Huang

Proceedings Volume 4027, Technologies for Synthetic Environments: Hardware-in-the-Loop Testing V; (2000) https://doi.org/10.1117/12.391678
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

CMOS/MEMS is used as a technique to create infrared emitters. A commercial CMOS process is used that, with a post-processing silicon etch, creates thermally isolated, electronically addressable polysilicon resistors suitable for infrared scene generation. Previous efforts have focused on 2.0 micron CMOS processes which require large suspended structures in order to accommodate the design rules. This work has successfully used a 1.2 micron commercial process with a post-processing silicon etch to scale down the emitter structure to 40 X 40 microns. This allows higher density arrays, and together with using the high value poly resistor available in the 1.2 micrometer process, allows lower current operation, significantly relaxing the design constraints previously encountered. A 128 X 128 design was fabricated in this process and is characterized using a microradiometer. A silicon-on-insulator thermal pixel array design with a further reduction in emitter dimensions is also presented.

Citation Download Citation

Bruce W. Offord, H. Ronald Marlin, Richard L. Bates, Gordon C. Perkins, Chris Hutchens, and Derek Yunchih Huang "Scaled CMOS MEMS for real-time infrared scene generation", Proc. SPIE 4027, Technologies for Synthetic Environments: Hardware-in-the-Loop Testing V, (12 July 2000); https://doi.org/10.1117/12.391678

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available