Integrated chemiresistor array for small sensor platforms

Robert C. Hughes; Stephen A. Casalnuovo; Kurt O. Wessendorf; Dan J. Savignon; Susan L. Hietala; Sanjay V. Patel; Edwin J. Heller

doi:10.1117/12.396280

22 August 2000 Integrated chemiresistor array for small sensor platforms

Robert C. Hughes, Stephen A. Casalnuovo, Kurt O. Wessendorf, Dan J. Savignon, Susan L. Hietala, Sanjay V. Patel, Edwin J. Heller

Author Affiliations +

Proceedings Volume 4038, Detection and Remediation Technologies for Mines and Minelike Targets V; (2000) https://doi.org/10.1117/12.396280
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

Chemiresistors are fabricated from materials that change their electrical a resistance when exposed to certain species. Composites of soluble polymers with metallic particles have shown remarkable sensitivity to many volatile organic chemicals, depending on the ability of the analyte molecules to swell the polymer matrix. These sensor can be made extremely small, operate at ambient temperatures, and require almost no power to read-out. However, the chemiresistors itself is only a part of a more complex sensor system that delivers chemical information to a user who can act on the information. We present the design, fabrication and performance of a chemiresistors array chip with four different chemiresistors materials, heaters and a temperature sensor. We also show the design and fabrication of an integrated chemical sensor array, where the electronics for measuring each chemiresistors' resistance are on the same chi with the chemiresistors films. The circuit was designed to perform several functions to make the sensor data more useful. The integrated chemiresistors' resistance are on the same chip with the chemiresistors films. The circuit was designed to perform several functions to make the senor dat more useful. The integrated chemiresistors array's small size and low power demand makes it ideal for deployment on a Sandia-developed microrobot platform.

Citation Download Citation

Robert C. Hughes, Stephen A. Casalnuovo, Kurt O. Wessendorf, Dan J. Savignon, Susan L. Hietala, Sanjay V. Patel, and Edwin J. Heller "Integrated chemiresistor array for small sensor platforms", Proc. SPIE 4038, Detection and Remediation Technologies for Mines and Minelike Targets V, (22 August 2000); https://doi.org/10.1117/12.396280

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