In-situ determination of work function distribution, composition, and chemical features of solid surfaces

Nicolaj M. Gnuchev

doi:10.1117/12.375417

25 January 2000 In-situ determination of work function distribution, composition, and chemical features of solid surfaces

Nicolaj M. Gnuchev

Author Affiliations +

Proceedings Volume 4064, Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2000) https://doi.org/10.1117/12.375417
Event: Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 1999, St. Petersburg, Russian Federation

Abstract

The possibility to determine simultaneously a wide range of the characteristics of solid surfaces is of great importance in studying their electronic properties. In material science, surface physics and emission electronics it is particularly interesting to get at the same time information about elemental composition, chemical state and work function distribution ofthe surface under investigation. Up to a present, these surface parameters have been determined separately, under nonidentical conditions. The composition and chemical state ofthe surface are usually studied by different kinds of electron spectroscopy most often -by Auger electron spectroscopy (AES); the absolute value ofwork function and its relative distribution along the surface are measured by the raster electron-beam method 2 Both methods allow to determine the local surface parameters mentioned above with practically the same spatial resolution ( -100 im2).

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Nicolaj M. Gnuchev "In-situ determination of work function distribution, composition, and chemical features of solid surfaces", Proc. SPIE 4064, Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (25 January 2000); https://doi.org/10.1117/12.375417

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