Paper
25 January 2000 Mechanical behavior and limits to the microhardness testing of hard multilayer coatings on soft substrates
Ilze Manika, Faina Muktepavela, Gunnar Sorensen
Author Affiliations +
Proceedings Volume 4064, Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2000) https://doi.org/10.1117/12.375454
Event: Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 1999, St. Petersburg, Russian Federation
Abstract
Multilayer coatings of (Ti, Al) Nx, (Ti, C)Nx and (Nb, C)Nx with bilayer thickness of 0.8 - 8 nm have been deposited by reactive sputtering on stainless steel substrates. Vickers microhardness measurements in the load range of 3.10-3 to 1 N were performed using a self- adjusting tester. It has been shown that in order to obtain the true hardness of multilayer coatings on a softer substrate, the indentation depth should not exceed about 10% of the coating thickness. Indentation criteria for polycrystalline, amorphous and nanostructured multilayer coatings are compared. The obtained criterion for multilayer coatings is close to that for amorphous films.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ilze Manika, Faina Muktepavela, and Gunnar Sorensen "Mechanical behavior and limits to the microhardness testing of hard multilayer coatings on soft substrates", Proc. SPIE 4064, Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (25 January 2000); https://doi.org/10.1117/12.375454
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Multilayers

Nanostructuring

Thin film coatings

Sputter deposition

Aluminum

Tungsten

Hard coatings

Back to Top