High-throughput micromachining of steel and ceramics with solid state UV laser

Sergei V. Govorkov; Evgueni V. Slobodtchikov; Alexander O. Wiessner; Dirk Basting

doi:10.1117/12.407399

16 August 2000 High-throughput micromachining of steel and ceramics with solid state UV laser

Sergei V. Govorkov, Evgueni V. Slobodtchikov, Alexander O. Wiessner, Dirk Basting

Proceedings Volume 4065, High-Power Laser Ablation III; (2000) https://doi.org/10.1117/12.407399
Event: High-Power Laser Ablation, 2000, Santa Fe, NM, United States

Abstract

Performance limits of 10 kHz, 15 nsec-pulse diode-pumped solid- state laser in microdrilling of metals and ceramics were studied. Average drilling rates approaching 1 cm/sec with micrometer-range accuracy of micro-holes are achievable in steel and ceramic samples up to 1 mm thick. We found that shielding effects of plasma plume can be minimized by proper selection of laser intensity. In samples 1 mm and thicker, using third harmonic output allows drilling of high aspect ratio holes at almost an order of magnitude higher ablation rates as compared to IR laser output.

Citation Download Citation

Sergei V. Govorkov, Evgueni V. Slobodtchikov, Alexander O. Wiessner, and Dirk Basting "High-throughput micromachining of steel and ceramics with solid state UV laser", Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); https://doi.org/10.1117/12.407399

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