Electromechanical characterization of screen-printed PZT thick films

Vincent Walter; Patrice Le Moal; Patrick Delobelle; Eric Joseph

doi:10.1117/12.396390

24 August 2000 Electromechanical characterization of screen-printed PZT thick films

Vincent Walter, Patrice Le Moal, Patrick Delobelle, Eric Joseph

Proceedings Volume 4073, Fifth European Conference on Smart Structures and Materials; (2000) https://doi.org/10.1117/12.396390
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

Thick soft and hard-PZT films have been fabricated on different geometries of Alumina substrates using a screen-printing technique. Three mechanical characterization tests were set up to determine Young's modulus of the films: dynamic, quasi-static and nanoindentation tests. A Young's modulus around 52+/- 7 Gpa was calculated. The piezoelectric coefficient d₃₁ was also investigated and is found to be close to -33pC/N. The fabricated films showed also good performances when used in damping control.

Citation Download Citation

Vincent Walter, Patrice Le Moal, Patrick Delobelle, and Eric Joseph "Electromechanical characterization of screen-printed PZT thick films", Proc. SPIE 4073, Fifth European Conference on Smart Structures and Materials, (24 August 2000); https://doi.org/10.1117/12.396390

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