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11 July 2000 Fabrications and characterizations of micromachined Fabry-Perot interferometers
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Abstract
Miniature micromachined Fabry-Perot interferometers (FPI) are composed of the corrugated silicon diaphragm and glass substrate. The flatness of the silicon diaphragms with a dimension of 4.2 mm in diameter can be controlled within 0.12 (mu) m. The optical depostion condition to grow thin Au films, as a reflector of FPI, can be established by studying the optical properties Au-photoresistent-As etalons. The interference spectra of micro-machined gap-tunable FPI with a structure of Si-Cr-Au-air-Au-Cr-glass have been observed in the near infrared regions. The transmittance and FWHM bandwidth of the as-bonded FPI is 5.6% and 3.84 nm at a peak wavelength of 1578.4 nm, respectively.
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Ran-Jin Lin "Fabrications and characterizations of micromachined Fabry-Perot interferometers", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392174
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