Gallium K-edge EXAFS study of GaN:Mg films

YungChung Pan; ShuFang Wang; WenHsiung Lee; WeiCherng Lin; ChenKe Shu; Chung-I Chiang; ChinHwa Lin; Horng Chang; JyhFu Lee; LingYun Jang; DengSung Lin; MingChih Lee; WenHsiung Chen; WeiKuo Chen

doi:10.1117/12.392184

11 July 2000 Gallium K-edge EXAFS study of GaN:Mg films

YungChung Pan, ShuFang Wang, WenHsiung Lee, WeiCherng Lin, ChenKe Shu, Chung-I Chiang, ChinHwa Lin, Horng Chang, JyhFu Lee, LingYun Jang, DengSung Lin, MingChih Lee, WenHsiung Chen, WeiKuo Chen

Author Affiliations +

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392184
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

Ga K-edge extended X-ray absorption fine structure (EXAFS) measurement was employed to investigate the local structure and GaN:Mg films grown my metalorganic vapor phase epitaxy (MOVPE) with various Cp₂Mg dopant flow rates using both in-plane and out-of-plane polarization modes of X-rayu. The near edge absorption spectra were found to depend on X-ray polarization strongly for undoped GaN sample and weakly to minutely for heavily Mg-doped and amorphous films. The results indicate Mg incorporation modifies the local structure around the absorber Ga atom and, hence, alters the molecular orbital electron transition of GaN sample. EXAFS analysis shows both vacancy an dMg-interstitial defects contribute to the reduction of coordination numbers along the hexagonal c-axis of GaN:Mg film.

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YungChung Pan, ShuFang Wang, WenHsiung Lee, WeiCherng Lin, ChenKe Shu, Chung-I Chiang, ChinHwa Lin, Horng Chang, JyhFu Lee, LingYun Jang, DengSung Lin, MingChih Lee, WenHsiung Chen, and WeiKuo Chen "Gallium K-edge EXAFS study of GaN:Mg films", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392184

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