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11 July 2000 New multichamber evaporator for organic devices
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A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density of thickness OLED at the same fabrication. The chamber three is a vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LfF, Ca, Al, Au.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiulai Wang, Weiling Guo, Michael C. Y. Chan, ShiChuang Liu, E. Herbert Li, and Charles C. Surya "New multichamber evaporator for organic devices", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000);

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