Monolithic thermal ink-jet print head combining anisotropic etching and electroplating

Chen-Yue Cheng; Je-Ping Hu; Yi-Hsuan Lai; Hui-Fang Wang; Chia-Tai Cheng

doi:10.1117/12.389452

28 June 2000 Monolithic thermal ink-jet print head combining anisotropic etching and electroplating

Chen-Yue Cheng, Je-Ping Hu, Yi-Hsuan Lai, Hui-Fang Wang, Chia-Tai Cheng

Proceedings Volume 4080, Input/Output and Imaging Technolgies II; (2000) https://doi.org/10.1117/12.389452
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

The paper proposed a high resolution single-chip monolithic inkjet printhead by combination glowing of nozzle plate on the silicon substrate and anisotropic etching. Ink channels are defined by a sacrificed layer and etched through a mesh network by anisotropic etching. Silicon based channels are strong enough to against the attack of ink solution. Surface planarization is achieved by using PECVD deposited low stress dielectric film on top of the channels to seal mesh cavities. The heater elements are buried in a thin- sandwiched membrane and face down like a back shooter. Ink slot is formed by etching the substrate from the backside and channel is then connected with ink slot. Electrical forming nozzle plate will be done later. In this structure, no more another ink channel material is necessary since it is formed on Si substrate. By direct forming nozzle plate on chip, alignment for bonding nozzle plate and chip could be avoided to cost down.

Citation Download Citation

Chen-Yue Cheng, Je-Ping Hu, Yi-Hsuan Lai, Hui-Fang Wang, and Chia-Tai Cheng "Monolithic thermal ink-jet print head combining anisotropic etching and electroplating", Proc. SPIE 4080, Input/Output and Imaging Technolgies II, (28 June 2000); https://doi.org/10.1117/12.389452

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available