Applications of AFM technology in CD-R research and development

Jielin Sun; Guoxuan Zhang; Qiquan Hu; Fuxi Gan

doi:10.1117/12.416848

7 February 2001 Applications of AFM technology in CD-R research and development

Jielin Sun, Guoxuan Zhang, Qiquan Hu, Fuxi Gan

Proceedings Volume 4085, Fifth International Symposium on Optical Storage (ISOS 2000); (2001) https://doi.org/10.1117/12.416848
Event: Fifth International Symposium on Optical Storage (IS0S 2000), 2000, Shanghai, China

Abstract

Atomic force microscope (AFM) is an invaluable measurement tool for analyzing the sub-micron and nanometer-level detail because of its ease of use, three-dimensional measurements and minimal sample preparation unlike TEM and SEM. So AFM can be used for both qualitative and quantitative information in optical storage science and technology. Its imaging can provides characterization of optical disc media with almost non-destructive. In CD-R manufacturing process, groove geometry structures of stamper, substrate and discs are very critical. In our experiments, pre-groove shape parameters (width, sidewall angle, depth and roughness) of many kinds of CD-R stampers (depth from 70 nm to 240 nm) were studied by AFM. The recorded bits on CD-R disc were observed and analyzed.

Citation Download Citation

Jielin Sun, Guoxuan Zhang, Qiquan Hu, and Fuxi Gan "Applications of AFM technology in CD-R research and development", Proc. SPIE 4085, Fifth International Symposium on Optical Storage (ISOS 2000), (7 February 2001); https://doi.org/10.1117/12.416848

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