Aluminum oxynitride rugate filters grown by reactive rf sputtering

Zhenhui Gou; Francis Placido

doi:10.1117/12.408382

29 November 2000 Aluminum oxynitride rugate filters grown by reactive rf sputtering

Zhenhui Gou, Francis Placido

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408382
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Aluminium oxynitride of graded-index films in which the refractive index changes continuously with thickness over the range 1.56 - 1.97 have been produced by reactive RF sputtering. Optical properties and other characteristics with deposition parameters have been investigated by Fractional Factorial Designs. We showed that the optical density of laser rejection filters can be made close to 5 and rejection wavelength can be chosen from 300 nm to infrared, coupled with good optical properties, hardness and adherence of these films. This work also showed that Factorial Design is a very efficient way to investigate or optimize the sputtering conditions.

Citation Download Citation

Zhenhui Gou and Francis Placido "Aluminum oxynitride rugate filters grown by reactive rf sputtering", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408382

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