Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates

D. Hernandez Cruz; P. K. Choudhury; Bendida Sahouli; Amir Tork; Roger A. Lessard

doi:10.1117/12.406461

15 December 2000 Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates

D. Hernandez Cruz, P. K. Choudhury, Bendida Sahouli, Amir Tork, Roger A. Lessard

Author Affiliations +

Proceedings Volume 4087, Applications of Photonic Technology 4; (2000) https://doi.org/10.1117/12.406461
Event: 2000 International Conference on Application of Photonic Technology (ICAPT 2000), 2000, Quebec City, Canada

Abstract

The characteristics of thin BaTiO3 films deposited on Si and MgO substrates by employing the metal-organic deposition technique are studied. In the experiment, the commercial barium 2-ethyihexanoate and the synthesized titanium dimethoxy dineodecanoate are used as precursors for the formation of BaTiO3 films. The film characterization is performed by X-ray diffraction and the scanning electron microscopy. The obtained results show that the prepared films have nearly good stoichiometry and the obtained tetragonal structure properties of BaTiO3 indicates that these may fmd some possible optical/electrical applications in the field ofintegrated optics technology.

Citation Download Citation

D. Hernandez Cruz, P. K. Choudhury, Bendida Sahouli, Amir Tork, and Roger A. Lessard "Fabrication and characterization of metalorganic-derived thin barium titanate ferroelectric films on silicon and magnesium oxide substrates", Proc. SPIE 4087, Applications of Photonic Technology 4, (15 December 2000); https://doi.org/10.1117/12.406461

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