Novel results of laser precision microfabrication with excimer lasers and solid state lasers

Uwe Stamm; Michael Fiebig; Sergei V. Govorkov; Eric E. Mayer; Rustem Osmanov; Michael J. Scaggs; Evgueni V. Slobodtchikov; Alexander O. Wiessner; Dirk Basting

doi:10.1117/12.405697

6 November 2000 Novel results of laser precision microfabrication with excimer lasers and solid state lasers

Uwe Stamm, Michael Fiebig, Sergei V. Govorkov, Eric E. Mayer, Rustem Osmanov, Michael J. Scaggs, Evgueni V. Slobodtchikov, Alexander O. Wiessner, Dirk Basting

Author Affiliations +

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405697
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Over the last decades laser technology has found the way into various industries. For microfabrication specifically excimer lasers have developed to powerful manufacturing tools because of their short UV wavelengths as well as the progress in excimer laser technology. More recently the development of pulsed medium-power diode-pumped solid-state lasers has opened the way to new micromachining applications related to the available superior beam quality. Here we review technological achievements in boh industrialized excimer lasers and diode-pumped Nd:YAG lasers for microfabrication. Data are presented for industrial 308 nm excimer lasers with energy stability better than 1 % (sigma) at 300 W average power. Using the latest technology in 157 nm excimer lasers applications of processing of difficult materials are presented. Finally we review results on studies of microdrilling of metals and ceramics using a newly developed 10 kHz diode-pumped solid-state laser at wavelengths 1064 nm, 532 nm and 355 nm.

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Uwe Stamm, Michael Fiebig, Sergei V. Govorkov, Eric E. Mayer, Rustem Osmanov, Michael J. Scaggs, Evgueni V. Slobodtchikov, Alexander O. Wiessner, and Dirk Basting "Novel results of laser precision microfabrication with excimer lasers and solid state lasers", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405697

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