Optical characterization of materials desposited by different processes: the LaF3 in the UV-visible region

Salvador Bosch; Norbert Leinfellner; Etienne Quesnel; Angela Duparre; Josep Ferre-Borrull; Stefan Guenster; Detlev Ristau

doi:10.1117/12.404761

19 October 2000 Optical characterization of materials desposited by different processes: the LaF₃ in the UV-visible region

Salvador Bosch, Norbert Leinfellner, Etienne Quesnel, Angela Duparre, Josep Ferre-Borrull, Stefan Guenster, Detlev Ristau

Author Affiliations +

Proceedings Volume 4094, Optical and Infrared Thin Films; (2000) https://doi.org/10.1117/12.404761
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The optical characterization of materials in thin film phase is a standard task in the field of coating technology. There are experimental circumstances where the accurate comparison between several deposition processes (for the same material) is important. In these cases, several sets of substrates are coated at the different deposition plants. The samples will be subsequently analyzed using, if the plants are at different locations, different spectrophometers and finally the results of all the optical characterizations will be compared. The aim of this work is to present the results of a global procedure for the optical characterization of LaF₃ in the UV-visible region, deposited at three different plants. We have used R and T spectrophotometric data and we have assumed the following model for the optical characterization: n(λ)=n₀+n₁/λ², k(λ)=k₀ exp(k₁/(λ). Our method characterizes all the samples from the same deposition process by a single set of parameters (instead of a set for each sample), using all the available measurements to determine them in a single numerical fitting, without a significant loss in the quality of the fittins. This procedure reduces the number of parameters and makes the comparison between different deposition processes more clear. By using similar results obtained for MgF₂ the optical characterization of stacks (manufactured using MgF₂ and LaF₃) is also presented.

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Salvador Bosch, Norbert Leinfellner, Etienne Quesnel, Angela Duparre, Josep Ferre-Borrull, Stefan Guenster, and Detlev Ristau "Optical characterization of materials desposited by different processes: the LaF₃ in the UV-visible region", Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); https://doi.org/10.1117/12.404761

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