Translator Disclaimer
Paper
20 September 2000 Separation of volatile and nonvolatile deposits on real-time SAW NVR detectors
Author Affiliations +
Abstract
Real-time instruments based on surface acoustic wave (SAW) resonators are now seeing greater application for measuring the accumulation of nonvolatile residues (NVRs) on contamination sensitive surfaces. In this paper, we study the use of a desiccant, or dry GN+-2) to remove volatile films from the SAW sensing surfaces, with the intent of leaving the NVR behind. Using water as moderately volatile model material, the SAW device was capable of indicating monolayer growth in agreement with the expected frequency change. The drying agent was successful in removing all water from the SAW device. Additionally, the SAW device was capable of detecting different regimes of desorption kinetics. In trials of several candidates, only one example of NVR could be deposited, most likely a phthalate from flexible tubing heated beyond its working temperature. The deposit was so large that it overwhelmed subsequent observations of water desorption.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenneth T. Luey, Dianne J. Coleman, and Joseph C. Uht "Separation of volatile and nonvolatile deposits on real-time SAW NVR detectors", Proc. SPIE 4096, Optical Systems Contamination and Degradation II: Effects, Measurements, and Control, (20 September 2000); https://doi.org/10.1117/12.400823
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Design issues of resonant piezoelectric sensors
Proceedings of SPIE (March 05 2008)
High-sensitivity real-time NVR monitor
Proceedings of SPIE (December 18 1992)
Chemical resonant sensors
Proceedings of SPIE (March 09 1993)

Back to Top