Scanning near-field optical microscope: systems designs, performance specifications, and standardization schemes

Tuan-Kay Lim

doi:10.1117/12.401618

29 September 2000 Scanning near-field optical microscope: systems designs, performance specifications, and standardization schemes

Tuan-Kay Lim

Author Affiliations +

Proceedings Volume 4098, Optical Devices and Diagnostics in Materials Science; (2000) https://doi.org/10.1117/12.401618
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

In recent years, there have been intense efforts in the study of the physical principles and applications of the scanning near-field optical microscope. Extensive theoretical analyses, numerical simulations, and experimental investigations have been conducted. It is demonstrated that image resolution and contrast depend not only on the aperture size of the probe and the reflection/transmission of the sample, but also on other parameters and experimental conditions. Accordingly, appropriate characterizations of image resolution and systems performance specifications are needed to enable the construction of more reliable and reproducible systems as well as inter-laboratory comparison. In this paper, recent advances in the systems design concepts for different applications will be reviewed, and possible standardization schemes for the characterization of image resolution and the specification of system performance will be proposed.

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Tuan-Kay Lim "Scanning near-field optical microscope: systems designs, performance specifications, and standardization schemes", Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); https://doi.org/10.1117/12.401618

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