Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique

Ibrahim Serroukh; Juan Carlos Martinez-Anton; Eusebio Bernabeu

doi:10.1117/12.405827

2 November 2000 Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique

Ibrahim Serroukh, Juan Carlos Martinez-Anton, Eusebio Bernabeu

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405827
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The purpose of this paper is to improve the metallic wire diameter measurement. The size of some thin wires and slits has been achieved using the spectrogoniometer which represents good alternative system of detection. The fact that, the technique of measurement may be regarded as bringing more calibrated diameter. Since it provides wide range of detection, possibility to control the output signal readjusting a minimum of points per fringe and few image error to deal with comparing to other measurement techniques. The target-arm of detection rotated and drifted by a stepping motor of high resolution. As we know the diffraction of the thin wires using Fraunhofer technique is very suitable for an automatic control in the process of fabrication. Whereas, the more precise diameter we want the more deeper study is required (both theory and experiment). Concerning the physical approach of the phenomena, we fit our data to a polynomial of the third order. The error of each coefficient is given. The odd term presented in the polynomial function may be due to the deviations from the ideal properties of the components. Once the measurements are made, a special care of the experimental data is required in order to deduce the right diameter confining us only to the minima of the diffraction pattern. The wire diameter accuracy depends not only how good is our signal but as well how good our analysis of data.

Citation Download Citation

Ibrahim Serroukh, Juan Carlos Martinez-Anton, and Eusebio Bernabeu "Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405827

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