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7 March 2006 High-resolution measurement of extended technical surfaces with scalable topometry
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The wide scale inspection of extended technical components with respect to the recognition of typical surface features (shape, texture, roughness) needs the combined application of different measurement techniques with new tools for the consistent analysis and description of the measuring results. The new concept of scaleable topometry meets the demands of wide scale surface topometry. Controlled by the evaluation of scale-independent surface features based on fractal geometry, different measurement techniques with subsequent lateral and depth resolution are applied to the surface. The result is a complete description of the surface covering a wide scale taking into account special regions of interest. The choice and orientation of the special measurement technique is supported by a new feature extraction method called the fractal pyramid. The advantages of the new concept are demonstrated on several technical components.
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Wolfgang Osten, Daniel Kayser, Thorsten Bothe, and Werner P. O. Jueptner "High-resolution measurement of extended technical surfaces with scalable topometry", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006);

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