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7 March 2006 Three-dimensional profilometry using moire pattern projection
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Abstract
This paper describes a grating projection method using phase shifting technique for the measurement of surface profiles of three dimensional objects. In this kind of profilometry a grating with binary intensity distribution has been utilized in most of cases. And in these cases such problems are known as an error is caused due to the non-sinusoidal intensity distribution of the grating and another difficulty is also indicated that the period of the grating is required to be adjusted in accordance with the size and profile of the specimen. Here we propose to use a moire pattern which is produced by superposing two binary gratings. When two gratings are overlapped with an appropriate gap, the resultant moire pattern becomes closely sinusoidal in intensity distribution. Then, in the optical arrangement for profile measurement using a grating projection method, if one grating is rotated, the period of the pattern is varied arbitrarily. And if one or two of the gratings are moved in one direction, the formed moire pattern can be moved in one way to give necessary shifting of the phase. Surface profiles of some samples are measured to show validity of the moire pattern projection and utility of the prototype system.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toru Yoshizawa, Takayoshi Yamaguchi, Masayuki Yamamoto, and Yukitoshi Otani "Three-dimensional profilometry using moire pattern projection", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); https://doi.org/10.1117/12.498432
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