Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding

Guoqiang Li; Pang Chen Sun; Yeshaiahu Fainman; Paul C. Lin

doi:10.1117/12.498380

7 March 2006 Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding

Guoqiang Li, Pang Chen Sun, Yeshaiahu Fainman, Paul C. Lin

Proceedings Volume 4101, Laser Interferometry X: Techniques and Analysis; (2006) https://doi.org/10.1117/12.498380
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

An interference microscope based on a wavelength-to-depth encoding technique is presented. The wavelength-to-depth encoding is realized by using a diffractive lens and wavelength tuning. The coherence degree of the interference fields versus wavelength is analyzed. A depth discrimination of 0.71µm is obtained with 0.90 NA objective lenses. Experimental results of a four-level grating measurement are presented with results are comparable to those obtained with a Dektak profilometer and the same interference microscope using mechanical depth-scanning. The system is promising for fast, noncontact, high- resolution three-dimensional imaging.

Citation Download Citation

Guoqiang Li, Pang Chen Sun, Yeshaiahu Fainman, and Paul C. Lin "Three-dimensional profilometry with interference microscope using wavelength-to-depth encoding", Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, (7 March 2006); https://doi.org/10.1117/12.498380

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KEYWORDS

Microscopes

Computer programming

Imaging systems

Calibration

Mirrors

Coherence (optics)

Objectives

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