Free-space micro-optical intra-MCM interconnection modules: performances, potentialities, and limitations

Valerie Baukens; Christof Debaes; Michael Vervaeke; Heidi Ottevaere; Bart Volckaerts; Pedro Vynck; Patrik Tuteleers; Alex Hermanne; Jan M. Van Campenhout; Mike Hanney; Irina P. Veretennicoff; Hugo Thienpont

doi:10.1117/12.409224

17 November 2000 Free-space micro-optical intra-MCM interconnection modules: performances, potentialities, and limitations

Valerie Baukens, Christof Debaes, Michael Vervaeke, Heidi Ottevaere, Bart Volckaerts, Pedro Vynck, Patrik Tuteleers, Alex Hermanne, Jan M. Van Campenhout, Mike Hanney, Irina P. Veretennicoff, Hugo Thienpont

Author Affiliations +

Proceedings Volume 4109, Critical Technologies for the Future of Computing; (2000) https://doi.org/10.1117/12.409224
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We design and realize a scalable multi-channel free-space interconnection prototype with the potential for Tb/s.cm² aggregate bit rate capacity over inter- and intra-MCM interconnection distances. The component is prototyped in a high quality optical plastic, PMMA, using deep lithography with protons. At present data communication is achieved at 622 Mb/s per channel with a BER smaller than 10^-13 for the 16 channels with inter-channel cross-talks as low as -22dB. We perform a sensitivity analysis for misalignments and study the impact of fabrication errors on the performance of the interconnection module in case injection moulding would be the preferred mass-fabrication technique. We provide evidence that these modules can be mass-fabricated with the required precision in optical plastics suited for heterogeneous integration with semiconductor materials.

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Valerie Baukens, Christof Debaes, Michael Vervaeke, Heidi Ottevaere, Bart Volckaerts, Pedro Vynck, Patrik Tuteleers, Alex Hermanne, Jan M. Van Campenhout, Mike Hanney, Irina P. Veretennicoff, and Hugo Thienpont "Free-space micro-optical intra-MCM interconnection modules: performances, potentialities, and limitations", Proc. SPIE 4109, Critical Technologies for the Future of Computing, (17 November 2000); https://doi.org/10.1117/12.409224

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