Silicon planar parabolic lenses

Vitaly V. Aristov; Michail Grigoriev; Serguei Kuznetsov; Leonid Shabelnikov; Vecheslav Yunkin; Christoph Rau; Anatoly A. Snigirev; Irina Snigireva; Timm Weitkamp; Martin Hoffmann; Edgar I. Voges

doi:10.1117/12.411648

5 January 2001 Silicon planar parabolic lenses

Vitaly V. Aristov, Michail Grigoriev, Serguei Kuznetsov, Leonid Shabelnikov, Vecheslav Yunkin, Christoph Rau, Anatoly A. Snigirev, Irina Snigireva, Timm Weitkamp, Martin Hoffmann, Edgar I. Voges

Author Affiliations +

Proceedings Volume 4145, Advances in X-Ray Optics; (2001) https://doi.org/10.1117/12.411648
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Silicon planar parabolic refractive lenses with relief depth of 100 micrometer are realized by microfabrication technique. A set of 5 planar lenses with simple parabolic profiles and equal apertures and equal focal distances is realized. This set consists of different number (from 1 to 8) of individual lenses. Lenses with minimized absorption as a set of parabolic segments are fabricated too. Focusing and spectral properties of silicon planar parabolic lenses were studied with synchrotron radiation in the x-ray energy range 8 - 25 keV at the ESRF. Linear focus spots of 1.5 micrometer width were recorded for the parabolic lenses and 1.8 micrometer for the lenses with minimized absorption. The intensity transmission of the lens with minimized absorption is two times greater than this value of simple parabolic lenses at 8 keV and in the x-ray energy range over 15 keV overcomes 90%. Spectral properties of the lenses with minimized absorption are discussed in details. Heatload properties of the silicon planar lenses are analyzed and compared with the lenses made of diamond.

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Vitaly V. Aristov, Michail Grigoriev, Serguei Kuznetsov, Leonid Shabelnikov, Vecheslav Yunkin, Christoph Rau, Anatoly A. Snigirev, Irina Snigireva, Timm Weitkamp, Martin Hoffmann, and Edgar I. Voges "Silicon planar parabolic lenses", Proc. SPIE 4145, Advances in X-Ray Optics, (5 January 2001); https://doi.org/10.1117/12.411648

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