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8 November 2000 High-precision measurements of the groove density of diffraction gratings
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Abstract
The diffraction gratings are widely used to monochromatize and even focus the soft X-ray radiation produced by the high brilliance third generation synchrotron radiation sources. Nevertheless, the final performance of an instrument that uses a diffraction grating is sensitive to any figure error and to any undesired groove density variation along the surface of the grating itself. Therefore, typical requirements are 0.1 - 0.2 arcsec (even less) on the residual slope errors (after proper shape subtraction), while the groove density is required to be constant along the surface with a percentage error below 0.1%. Vice-versa, sometimes groove density variation is required along the surface to correct spherical aberrations or to change the focal properties of a grating. Since the gratings, in the soft X-ray region, work in grazing incidence mode, the ideal instrument to measure it is a mono-dimensional profilometer. At ELETTRA, the Italian third generation synchrotron radiation source, we have an in house modified version of the Long Trace Profiler.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniele Cocco, Rudi Sergo, Giovanni Sostero, and Marco Zangrando "High-precision measurements of the groove density of diffraction gratings", Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); https://doi.org/10.1117/12.406666
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