Laser microprocessing and its applications in the microelectronics industry

Yongfeng Lu; ZhongMin Ren

doi:10.1117/12.413755

30 January 2001 Laser microprocessing and its applications in the microelectronics industry

Yongfeng Lu, ZhongMin Ren

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413755
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

Laser micro processing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser micro processing, (2) laser texturing, laser bumping and related technologies, (3) real-time monitoring of laser surface processing, (4) laser- induced controllable periodic structures and (5) laser nano- etching and nano lithography by tip-enhanced laser irradiation.

Citation Download Citation

Yongfeng Lu and ZhongMin Ren "Laser microprocessing and its applications in the microelectronics industry", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413755

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