Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readout

Spyros Kavadias; Piet De Moor; Martin Gastal; Niki Hendrikx; Filip Wirix; Chris A. Van Hoof

doi:10.1117/12.417122

9 February 2001 Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readout

Spyros Kavadias, Piet De Moor, Martin Gastal, Niki Hendrikx, Filip Wirix, Chris A. Van Hoof

Author Affiliations +

Proceedings Volume 4169, Sensors, Systems, and Next-Generation Satellites IV; (2001) https://doi.org/10.1117/12.417122
Event: Europto Remote Sensing, 2000, Barcelona, Spain

Abstract

12 An IR sensor based on a linear array of poly Si-Ge bolometers is presented. The bolometers are surface micromachined devices employing a suspended structure to achieve thermal insulation from the substrate. Linear arrays of 64 elements have been connected to the readout chip by means of a ceramic substrate realizing a hybrid sensor. The CMOS readout chip provides a pulsed bias for the bolometers, amplification of the signal and multiplexes the output in an analog line. At room temperature an NETD of 300mK has been achieved, while the maximum readout speed is 1kHz.

Citation Download Citation

Spyros Kavadias, Piet De Moor, Martin Gastal, Niki Hendrikx, Filip Wirix, and Chris A. Van Hoof "Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readout", Proc. SPIE 4169, Sensors, Systems, and Next-Generation Satellites IV, (9 February 2001); https://doi.org/10.1117/12.417122

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