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18 August 2000 High-performance micropumps based on printed circuit board technology
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Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000)
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
This paper presents a high performance micropump based on the printed circuit board technology. This pump was our first effort to lower the packaging cost by combining functional elements (diffuser/nozzle) with packaging materials (PCB, inlet/outlet tubes). The paper presents in details the numerical simulation, the fabrication and the experimental characterization of the pump. Experimental results have shown a high pump performance. A flow rate of 3 ml/min can be achieved with a drive voltage of 120V. Pumps with different distances between inlet and outlet were tested. Characterization results agreed well with simulation results. Pumps with a short distance between inlet and outlet have a better performance.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nam-Trung Nguyen and Xiaoyang Huang "High-performance micropumps based on printed circuit board technology", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000);

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