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18 August 2000 Investigations into the flow characteristics of hexagonal ducts etched in <100> silicon
Nicolae Damean, Paul P. L. Regtien
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Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395651
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
This paper focuses on two main subjects encountered in the design process fo the ducts working in the micro yard. They are: the achievement of the Poiseuille number P0 and the achievement of an analytical formula for the velocity field in the hydrodynamically developed flow. These subjects are dictated by the new technologies that support building hexagonal ducts etched in <100$GTRsilicon, an usual component of the structures operating in the fluid environment. Concerning the first subject, we develop a procedure for obtaining the Poiseuille number P0 versus that aspect ratio of the hexagonal cross section. The validity of this procedure is proven using different shapes of cross sections. We underline the merit of this procedure, namely the rather straightforward use of a commercial software package. Another subject detailed herein is the building of an approximative analytical formula for the velocity field inside hexagonal ducts. We detail two approaches and we discuss their limitations in practical circumstances encountered during the design process of a structure for determination of fluid and flow characteristics. The simple applicability of the inferred formulas contrasts with the classical and huge time consuming numerical approaches, these formulas being suitable tools in the design process of the structure operating in the micro world. The results presented in this paper might be adapted for similar structures operating in the macro world as well as for many other situations where devices containing ducts having various non-circular cross sections are present.
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Nicolae Damean and Paul P. L. Regtien "Investigations into the flow characteristics of hexagonal ducts etched in <100> silicon", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395651
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KEYWORDS
Silicon
Microfluidics
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