Practical aspects of micromachined gas distribution systems for semiconductor processing

Albert K. Henning; Brad A. Cozad; Elizabeth Lawrence; Errol B. Arkilic; James M. Harris

doi:10.1117/12.395668

18 August 2000 Practical aspects of micromachined gas distribution systems for semiconductor processing

Albert K. Henning, Brad A. Cozad, Elizabeth Lawrence, Errol B. Arkilic, James M. Harris

Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395668
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Previously, we have reported the science and technology of micromachiend valves and orifices, and their integration to form high-performance mass-flow controllers (MFCs), and vacuum leak rate shut-off devices (SOVs). In this work, we expand the science and technology base of these devices, to include not only performance, but more practical aspects of their behavior. Specifically, for MFCs we have studied long-term drift, mean time tofail, particle generation, dry down after moisture contamination, gas replacement, effects of gravitational orientation, and sensitivity to inlet pressure and ambient temperature. For SOVs, we have studied mean time to fail, particle generation, dry down after moisture contamination, vacuum leak rate, and sensitivity to inlet pressure and ambient temperature.

Citation Download Citation

Albert K. Henning, Brad A. Cozad, Elizabeth Lawrence, Errol B. Arkilic, and James M. Harris "Practical aspects of micromachined gas distribution systems for semiconductor processing", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395668

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available