Development of individually addressable micromirror arrays for space applications

Sanghamitra B. Dutta; Audrey J. Ewin; Murzy D. Jhabvala; Carl A. Kotecki; Jonathan L. Kuhn; David Brent Mott

doi:10.1117/12.396508

22 August 2000 Development of individually addressable micromirror arrays for space applications

Sanghamitra B. Dutta, Audrey J. Ewin, Murzy D. Jhabvala, Carl A. Kotecki, Jonathan L. Kuhn, David Brent Mott

Author Affiliations +

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396508
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

A 2D array of individually addressable micro-mirrors with 100 micrometers by 100 micrometers pixel size, capable of tilting +/- 10⁰ by electrostatic actuation is being developed and fabricated at the Detector Development Laboratory of NASA, GSFC. The development requires integration of CMOS and MEMS fabrication processes. We have competed extensive analytical studies and performed laboratory test to compare model predictions with actual performance of a 3 by 3 array. We are testing the address and driver circuit for a 32 by 32 array and also developing the process integration of the CMOS and MEMS fabrication of the larger arrays. The mirrors are capable of operating at cryogenic temperature for astronomical applications. Our goal is to extend the development to a 25 6by 256 array for a wide variety of space applications including the multi-object-spectrometer in the next generation space telescope.

Citation Download Citation

Sanghamitra B. Dutta, Audrey J. Ewin, Murzy D. Jhabvala, Carl A. Kotecki, Jonathan L. Kuhn, and David Brent Mott "Development of individually addressable micromirror arrays for space applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396508

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