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22 August 2000 MOEMS arrays for interconnect applications
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000)
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
The evolution of computer chip technology has been marked by a steady progression toward higher performance which will soon be limited by the time delay associated with interconnects. This has led to consideration of alternate interconnect methods to complement or replace conventional metal/dielectric architectures for both intra-chip and chip to chip and detectors. The interconnect medium for this approach, however, is still under conceptual design and has spawned many candidates. Various configurations of static micro-optic arrays however, recent consideration has been given to active, reconfigurable optics based on micro-electro-mechanical systems (MEMS) technologies. These Optical MEMS or MOEMS have enabled innovative devices which can control phase, amplitude and direction of input light beams. One area which has recently received much attention is the creation and use of both reflective and diffractive arrays. This paper will present the development and use of active, reconfigurable MOEMS prototypes applied to proof of principle optical interconnect systems. We have been studying several array architectures consisting of gratings, columnar reflectors and micromirrors. For example, the patented MEMS-based compound grating (MCG) is currently being developed to enable a new class of diffractive arrays which can be used as a massively parallel switch. The MCG is a device which is a superposition of two or more diffraction gratings whose surface topology can be controlled. Various prototype arrays of these MCG devices have been designed, modeled, fabricated and tested. Initial result of these studies will be presented. In addition, application of the digital micromirror device to this problem will also be discussed. Using a custom control software and optical setup, preliminary results from the integration of a DMD into an optical interconnect test stand will be presented.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James Castracane, Bai Xu, Christian Baks, Mikhail A. Gutin, and Olga N. Gutin "MOEMS arrays for interconnect applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000);

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