Metrology for laser-structured microdevices by CCD-camera-based vision systems

Andreas Ostlender; Udo Puetz; Ernst-Wolfgang Kreutz

doi:10.1117/12.396489

22 August 2000 Metrology for laser-structured microdevices by CCD-camera-based vision systems

Andreas Ostlender, Udo Puetz, Ernst-Wolfgang Kreutz

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396489
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Recent developments in the are of micromachining and microfabrication are accelerating commercial awareness of microstructures. Product applications ranging form automotive and medical devices to industrial, chemical and consumer products show the necessity of adequate fabrication methods for microstructures. These fabrication methods include high resolution measurement technologies. Images of the machined area, recorded via videography by a CCD-camera based computer vision system are evaluated to obtain the two dimensions of the microstructured devices. Height measurement is performed by automatically focusing on two different levels of the workpiece. The achieved accuracy of the measurement data is evaluated. During structuring of microdevices an autofocus system is used to control the removal process by laser radiation to obtain the desired geometry. The mathematical algorithms used by the vision system to guide the focus of the CCD-camera are discussed. The designed measurement system is tested by microstructuring of hard metals and ceramics with short pulse laser radiation.

Citation Download Citation

Andreas Ostlender, Udo Puetz, and Ernst-Wolfgang Kreutz "Metrology for laser-structured microdevices by CCD-camera-based vision systems", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396489

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available