Micromirrors and micromirror arrays for scanning applications

Thomas Gessner; Steffen Kurth; Christian Kaufmann; Joachim Markert; Andreas Ehrlich; Wolfram Doetzel

doi:10.1117/12.396505

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22 August 2000 Micromirrors and micromirror arrays for scanning applications

Thomas Gessner, Steffen Kurth, Christian Kaufmann, Joachim Markert, Andreas Ehrlich, Wolfram Doetzel

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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396505
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The main focus of this contribution will be the description of already realized applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monocrystalline silicon and are convenient for continuous scanning with working frequencies between several 100 Hz up to 100 kHz.

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Thomas Gessner, Steffen Kurth, Christian Kaufmann, Joachim Markert, Andreas Ehrlich, and Wolfram Doetzel "Micromirrors and micromirror arrays for scanning applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396505

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