Translator Disclaimer
Paper
22 August 2000 New design for an integrated Fourier transform spectrometer
Author Affiliations +
Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396502
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
We present a miniaturized Fourier transform (FT) spectrometer based on silicon micromachined. The FTS is a Michelson interferometer with one scanning mirror. The motion of the mirror is carried out by a n electrostatic comb drive actuator. The mirror displacement is 39 micrometers and its reproducibility is +/- 13 nm, which leads to a resolution better than 10 nm in the visible wavelength range. A new design of this chip has been realized in order to integrate an input fiber, a collimating lens system as well as a beam splitting plate. This new design allows to undertake spectroscopy with white light. The limitation of light collimation and the effect of the size of the source have been studied by numerical simulations.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Omar Manzardo, Hans Peter Herzig, Benedikt Guldimann, Cornel Marxer, and Nico F. de Rooij "New design for an integrated Fourier transform spectrometer", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396502
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
Back to Top