Optical performance requirements for MEMS-scanner-based microdisplays

Hakan Urey; David W. Wine; Thor D. Osborn

doi:10.1117/12.396486

22 August 2000 Optical performance requirements for MEMS-scanner-based microdisplays

Hakan Urey, David W. Wine, Thor D. Osborn

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396486
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

High-resolution and high frame rate dynamic microdisplays can be implemented by scanning a photon beam in a raster format across the viewer's retina. Microvision is developing biaxial MEMS scanners for such video display applications. This paper discusses the optical performance requirements for scanning display systems. The display resolution directly translates into a scan-angle-mirror-size product and the frame rate translates into vertical and horizontal scanner frequencies. (theta) -product and f_h are both very important figures of merit for scanner performance comparison. In addition, the static and dynamic flatness of the scanners, off-axis motion and scan repeatability, scanner position sensor accuracy all have a direct impact on display image quality.

Citation Download Citation

Hakan Urey, David W. Wine, and Thor D. Osborn "Optical performance requirements for MEMS-scanner-based microdisplays", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396486

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