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18 August 2000 Fabrication of microlens arrays in CaF2 by ion milling
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Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000)
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Calcium Fluoride microlens arrays have been produced with the help of an ion milling transfer of photoresist lenses which have been fabricated by two different techniques (i) by a melting resist technique and (ii) gray scale lithography. Major technical problems connected with the ion milling transfer of the photoresist lenses in the CaF2 material are surface roughness enhancement and variation of the lens shape. We studied the ion-induced decomposition of CaF2 and the surface roughness equatio in dependence on different milling conditions. For the microlens patter transfer the ratio of etching rates of the photoresist and the CaF2 have been adjusted by gas admixture of nitrogen to the Ar sputtering gas. The angle dependence of the etching rates leads also to a changing of the lens profile. The effect of ion beam induced surface roughness and the accuracy of the transfer process is discussed.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dieter Flamm, Axel Schindler, Torsten Harzendorf, and Ernst-Bernhard Kley "Fabrication of microlens arrays in CaF2 by ion milling", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000);


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