Micro-optical elements fabricated with single step

Lin Pang; Deer Yi; Yingbai Yan; Guofan Jin; Minxian Wu

doi:10.1117/12.395693

18 August 2000 Micro-optical elements fabricated with single step

Lin Pang, Deer Yi, Yingbai Yan, Guofan Jin, Minxian Wu

Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395693
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Tetraethoxyorthosilicate and methacryloxypropyl trimethoxy silane are used to form inorganic and organic networks, respectively. Photosensitive agent is added to initiate free-radical cross-linking polymerization of unsaturated carbon bonds and thus makes the material act as a negative tone photoresist. The sensitivity of the composite material is investigated with the help of real-time diffraction for different exposure time and concentration of photoinitiator. Vibrational spectroscopy is used to provide insight into the structure changes that occur when films are exposed with UV light. Developed in dilute base solution, microoptical element, such as lenses and gratings, were fabricated by contract copy with UV-exposure. Shrinkage effect is investigated after optical elements obtained.

Citation Download Citation

Lin Pang, Deer Yi, Yingbai Yan, Guofan Jin, and Minxian Wu "Micro-optical elements fabricated with single step", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); https://doi.org/10.1117/12.395693

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