Micro-optics development in the past decade

Haluk O. Sankur; M. Edward Motamedi

doi:10.1117/12.395678

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18 August 2000 Micro-optics development in the past decade

Haluk O. Sankur, M. Edward Motamedi

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Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395678
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The field of microoptics has grown into an important technology in the past decade as evidenced by the growing range of applications using microoptic compontents. The development of large-volume, batch-processed diffractive and refractive microooptics component manufacturing has created a technology that promises to revolutionize many electro-optical systems. Microoptics is an enabling technology for applications that cannot be addressed using conventional optics and is currently playing a significant role in numerous applications, including lightwave communications, optical interconnects, detector arrays, visible and infrared imagers, beam steering, and display systems. The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of microoptics technology in commercial, space and military systems. Since microoptic processes are compativle with integrated circuits, a broader range of applications is expected as microoptics become integrated with MEMS devices. Other more complex microsystems that use microoptic devices such as microspectrometers, microinterferometers and miniature on-machine-inspection subsystems are being investigated. This new technology enables high performance optical components that are lighter, easier to produce, more efficient, and less expensive than conventional components. We present a broad survey of developments in microoptics, including design, fabrication, and applications, in the last decade.

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Haluk O. Sankur and M. Edward Motamedi "Micro-optics development in the past decade", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); https://doi.org/10.1117/12.395678

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