Translator Disclaimer
18 August 2000 Design and fabrication of a GXGA microdisplay chip
Author Affiliations +
Microdisplay-based imaging system are quickly becoming very important. A light valve based on a GXGA microdisplay with 5 megapixels is targeted. The pixel pitch is 15 micrometers , leading to an active display area of 38.4 by 30.72 mm. Both the design and the fabrication of such a large die have presented several challenges. This paper describes the design of reticles for GXGA resolution with on-chip drivers. The chip size associated with this resolution e4xceeds the available reticle size. Stitching is used for the processing of large x-Si backplanes. The reticle set is also suitable for GXGA and XGAp resolutions with drivers. The front-end layers are implemented in a standard double metal 0.7micrometers CMOS technology extended with minimal adaptations. The back-end comprises advanced sub-halfmicron processing steps: two metallization layers with a 500nm-feature size for the light shielding function resp. mirroring function.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul M. F. Colson, Freddy De Pestel, Marnix Tack, Gust Schols, Herbert De Smet, Jean Van den Steen, and Andre Van Calster "Design and fabrication of a GXGA microdisplay chip", Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000);


Back to Top