Effect of registration and proximity effect in split-gate flash device

Jian-Yuan Chiou; D. F. Huang; C. L. Liu; Chih-Chien Hung

doi:10.1117/12.410097

23 August 2000 Effect of registration and proximity effect in split-gate flash device

Jian-Yuan Chiou, D. F. Huang, C. L. Liu, Chih-Chien Hung

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410097
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

Split-Gate Flash Device, the poly-to-poly FN Tunneling for erasing and programming with poly gape, is good structure to eliminate the stacked gate issue of 'over-erase' by additional selected gate which is isolating each memory cell from the bit line. However, the overlay error is more concerned, since they require more accuracy in registrations of P1 to Nitrid and P2 to P1. The registration error, including sampling error, mask error and proximity effect, especially at edge pattern of die, result in the field related low yield because of cell leak issue and cell punch-through. From experiment result, different SERIF design shape, the additional OPC, make different CD performance to improve the different direction of registration error. Mask error and proximity error can contribute overlay shift between cell and box-in-box of overlay monitor frame, so the layer shift addition should be considered those intrinsic error and we add scaling and sampling monitor to avoid the registration error of site to site or wafer to wafer.

Citation Download Citation

Jian-Yuan Chiou, D. F. Huang, C. L. Liu, and Chih-Chien Hung "Effect of registration and proximity effect in split-gate flash device", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410097

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available