Technique of electrical beam treatment leading to an accurate and reliable critical dimension metrology measurement on a postetch layer

Gary X. Cao; Nancy J. Wheeler; Alan S. Wong

doi:10.1117/12.410064

23 August 2000 Technique of electrical beam treatment leading to an accurate and reliable critical dimension metrology measurement on a postetch layer

Gary X. Cao, Nancy J. Wheeler, Alan S. Wong

Author Affiliations +

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410064
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

Accurate and reliable CD measurement is one of the most important goals of CD metrology. Today, most CD measurements are performed utilizing the SEM. One of the most commonly employed measurement detection algorithms is the Threshold method. This method is most useful for measuring CD when the structure begin measured consistently produces stable peaks in the secondary electron induced image intensity profile. However, the intensity profile becomes more complicated when there are multiple peaks whose peak heights are neither stable nor fixed in position. In this case, accurate and reliable CD measurements are difficult to achieve. In this paper, a novel technique of pre-dose and re-dose electrical beam treatment will be described. The technique is effective in producing reliable intensity profiles resulting in accurate CD measurements, and the recipe developed using the technique runs fully automated. The technique has been applied in our factory with success.

Citation Download Citation

Gary X. Cao, Nancy J. Wheeler, and Alan S. Wong "Technique of electrical beam treatment leading to an accurate and reliable critical dimension metrology measurement on a postetch layer", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410064

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available