Ultra-low coherence interferometry for determination of refractive index and thickness of transparent film

S. Inoue

doi:10.1117/12.2302235

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9 November 2000 Ultra-low coherence interferometry for determination of refractive index and thickness of transparent film

S. Inoue

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Proceedings Volume 4185, Fourteenth International Conference on Optical Fiber Sensors; 41852K (2000) https://doi.org/10.1117/12.2302235
Event: Fourteenth International Conference on Optical Fiber Sensors, 2000, Venice, Italy

Abstract

The interferometer with illumination of a halogen lamp is characterized, in which the resulting coherence length is only 1.6μm at the center wavelength of 657nm. This sort of ultra-low coherence interferometer is used for simultaneous measurement of refractive index and thickness of sputtered film even when the film thickness is 2μm or less. The measurement is made by a novel coherence-gate reflectance method, to our knowledge, which has an advantage that the measurement time is only 15sec with an error of only 0.3%. Both the refractive index and thickness distributions of SiO₂ sputtered film are also presented.

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S. Inoue "Ultra-low coherence interferometry for determination of refractive index and thickness of transparent film", Proc. SPIE 4185, Fourteenth International Conference on Optical Fiber Sensors, 41852K (9 November 2000); https://doi.org/10.1117/12.2302235

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