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2 August 2000 Some aspect of MEMS technology
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Proceedings Volume 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics; (2000) https://doi.org/10.1117/12.394145
Event: Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, 1999, Moscow, Russian Federation
Abstract
The paper considers differences between basic operations of the microelectromechanical systems (MEMS) and microelectronic manufacturing processes. The design and fabrication of the vibration microgyroscope are discussed to exemplify the inadequacy of standard microelectronic techniques for needs of MEM technologies and necessity of developing new basic technologies.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Evgenij N. Pyatishev, Mihail S. Lurie, and Irina V. Popova "Some aspect of MEMS technology", Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); https://doi.org/10.1117/12.394145
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