Design flow for MOEMS

Arthur S. Morris III; Stephen F. Bart; Derek Kane; Gunar Lorenz; Vladimir L. Rabinovich

doi:10.1117/12.417352

6 March 2001 Design flow for MOEMS

Arthur S. Morris III, Stephen F. Bart, Derek Kane, Gunar Lorenz, Vladimir L. Rabinovich

Proceedings Volume 4198, Optomechanical Engineering 2000; (2001) https://doi.org/10.1117/12.417352
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

As MOEMS transition from laboratory curiosities to production products inserted into telecommunication systems, a complete design flow is necessary for rapid product development to minimize time-to-market. We present a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification. The detailed MOEMS device design is addressed along with an integrated capability for including other optical elements, packaging, opto- electronics, as well as drive and control electronics.

Citation Download Citation

Arthur S. Morris III, Stephen F. Bart, Derek Kane, Gunar Lorenz, and Vladimir L. Rabinovich "Design flow for MOEMS", Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); https://doi.org/10.1117/12.417352

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