Optomechanical modeling for fabrication of MEMS micromirrors

Jeff Odhner; Daniel J. Keating; Nora Finch

doi:10.1117/12.417339

6 March 2001 Optomechanical modeling for fabrication of MEMS micromirrors

Jeff Odhner, Daniel J. Keating, Nora Finch

Proceedings Volume 4198, Optomechanical Engineering 2000; (2001) https://doi.org/10.1117/12.417339
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

This paper will present a method for rapidly developing MEMS micro-mirrors by utilizing CAD tools currently available. Design begins with a mask layout which leads to analysis of one mirror. These results are then used to model a complete array.

Citation Download Citation

Jeff Odhner, Daniel J. Keating, and Nora Finch "Optomechanical modeling for fabrication of MEMS micromirrors", Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); https://doi.org/10.1117/12.417339

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