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6 March 2001 Optomechanical modeling for fabrication of MEMS micromirrors
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Proceedings Volume 4198, Optomechanical Engineering 2000; (2001) https://doi.org/10.1117/12.417339
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States
Abstract
This paper will present a method for rapidly developing MEMS micro-mirrors by utilizing CAD tools currently available. Design begins with a mask layout which leads to analysis of one mirror. These results are then used to model a complete array.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeff Odhner, Daniel J. Keating, and Nora Finch "Optomechanical modeling for fabrication of MEMS micromirrors", Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); https://doi.org/10.1117/12.417339
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